(Ba,Sr)TiO3 -based Electrolyte Conductivity Sensors: a Comparative Study
Electronics
Keywords:
contactless, electrolyte conductivity, perovskite-oxide film, interdigitated electrode.
Abstract
A contactless electrolyte conductivity sensor based on (Ba,Sr)TiO3 films and Pt interdigitated electrodes is fabricated and examined. Two types of sensor designs with buried(into insulating SiO2layer) and non-buried interdigitated electrodes were investigated and compared. The sensors were characterized by means of impedance-spectroscopy measurements indifferent commercially available electrolyte-conductivity standard solutions ranging from 0.084 to 50 mS/cm and over the frequency range from 1 Hz to 3 MHz. It is shown that the parameters of sensors with the Pt electrodes buried in SiO2 layer are favourable