Fabrication of Ferroelectric-Based Electrolyte Conductivity Sensor for Measuring Low Ion Concentrations

V. V. Buniatyan; C. A. Huck; А. S. Poghossian; M. J. Schöning; T. N. Petrosyan

V. V. Buniatyan State Engineering University of Armenia (Polytechnic)
C. A. Huck FH Aachen | University of Applied Sciences, Institute of Nano- and Biotechnologies, Campus Jülich
А. S. Poghossian FH Aachen | University of Applied Sciences, Institute of Nano- and Biotechnologies, Campus Jülich
M. J. Schöning FH Aachen | University of Applied Sciences, Institute of Nano- and Biotechnologies, Campus Jülich
T. N. Petrosyan State Engineering University of Armenia (Polytechnic)

Keywords: contactless, electrolyte conductivity, perovskite-oxide film, interdigitated electrode.

Abstract

A new capacitively-coupled contactless electrolyte conductivity detection (C4D) sensor based on Pt interdigitated electrodes is proposed and realized. High dielectric permittivity perovskite-oxide ferroelectric films of bariumstrontium titanate (BST) have been used as insulating material protecting Pt electrodes from solution. For C4D sensor fabrication,two techniques are used: self-propagating high-temperature synthesis for the preparation of BST targets and the pulsed laser deposition for the deposition of thin BST films on top of Pt interdigitated electrodes. In the proposed sensor structure, the interdigitated Pt electrodes are buried into the insulating SiO2 layer. The consecutive steps of the technological processes as well ascross section and top view of the prepared sensor are presented.

Author Biographies

V. V. Buniatyan, State Engineering University of Armenia (Polytechnic)

Buniatyan Vahe Vazgen

Dr. of tech. sci., Professor, Head of the Chair MBMD

C. A. Huck, FH Aachen | University of Applied Sciences, Institute of Nano- and Biotechnologies, Campus Jülich

Huck Christina

А. S. Poghossian, FH Aachen | University of Applied Sciences, Institute of Nano- and Biotechnologies, Campus Jülich

Poghossian Arshak Stepan

Dr. of tech. sci., Professor

M. J. Schöning, FH Aachen | University of Applied Sciences, Institute of Nano- and Biotechnologies, Campus Jülich

Schoening Michael

Dr. of tech. sci., Professor

T. N. Petrosyan, State Engineering University of Armenia (Polytechnic)

Petrosyan Tigran Norik

Graduate student

Fabrication of Ferroelectric-Based Electrolyte Conductivity Sensor for Measuring Low Ion Concentrations

Electronics

Abstract

Author Biographies